High-efficiency silicon metasurface mirror on a sapphire substrate

authored by
Mariia Matiushechkina, Andrey B. Evlyukhin, Vladimir A. Zenin, Michèle Heurs, Boris N. Chichkov
Abstract

For a possible implementation of high-efficiency Si-nanosphere metasurface mirrors functioning at telecom wavelengths in future gravitational wave detectors, exact dimensional and configuration parameters of the total system, including substrate and protective coating, have to be determined a priori. The reflectivity of such multi-layer metasurfaces with embedded Si nanoparticles and their potential limitations need to be investigated. Here we present the results on how the substrate and protective layer influence optical properties and demonstrate how dimensional and material characteristics of the structure alter light reflectivity. Additionally, we consider the impact of manufacturing imperfections, such as fluctuations of Si nanoparticle sizes and their exact placement, on the metasurface reflectivity. Finally, we demonstrate how high reflectivity of the system can be preserved under variations of the protective layer thickness, incident angle of light, and its polarization.

Organisation(s)
PhoenixD: Photonics, Optics, and Engineering - Innovation Across Disciplines
Institute of Gravitation Physics
Institute of Quantum Optics
QuantumFrontiers
External Organisation(s)
University of Southern Denmark
Type
Article
Journal
Optical materials
Volume
138
ISSN
0925-3467
Publication date
04.2023
Publication status
Published
Peer reviewed
Yes
ASJC Scopus subject areas
Electronic, Optical and Magnetic Materials, Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering, Spectroscopy, Inorganic Chemistry, Physical and Theoretical Chemistry, Organic Chemistry
Electronic version(s)
https://doi.org/10.1016/j.optmat.2023.113618 (Access: Open)