Electrical Properties of Thin ZrSe3Films for Device Applications

authored by
Lars Thole, Christopher Belke, Sonja Locmelis, Peter Behrens, Rolf J. Haug
Abstract

Measurements of key properties of the two-dimensional transition metal trichalcogenide ZrSe3are reported. The bulk material was created by chemical vapor deposition and subsequently exfoliated to obtain thin films of varying thicknesses. The samples were then characterized by atomic force microscopy measurements and Raman spectroscopy and contacted by e-beam lithography. Electrical measurements give values for the band gap energy of 0.6 eV increasing for thinner samples. Transistor measurements show ZrSe3to be an n-type semiconductor. By looking at several samples with varying thicknesses, it was possible to determine a mean free path of 103 nm for the bulk material which opens the possibility for new electronic devices.

Organisation(s)
Institute of Solid State Physics
Institute of Inorganic Chemistry
Laboratory of Nano and Quantum Engineering
QuantumFrontiers
Type
Article
Journal
ACS Omega
Volume
7
Pages
39913-39916
No. of pages
4
Publication date
08.11.2022
Publication status
Published
Peer reviewed
Yes
ASJC Scopus subject areas
Chemistry(all), Chemical Engineering(all)
Electronic version(s)
https://doi.org/10.1021/acsomega.2c04198 (Access: Open)